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Abstract
BiFeO
3 films undoped and doped with Ba and/or Ti have been fabricated through Metal-Organic Chemical Vapor Deposition (MOCVD) on SrTiO
3 (100), SrTiO
3:Nb (100) and YSZ (100) substrates. Films have been deposited using a multi-metal source, consisting of the Bi(phenyl)
3, Fe(tmhd)
3, Ba(hfa)
2•tetraglyme and Ti(tmhd)
2(O-iPr)
2 (phenyl= -C
6H
5, H-tmhd=2,2,6,6- tetramethyl-3,5-heptandione; O-iPr= iso-propoxide; H-hfa=1,1,1,5,5,5-hexafluoro-2,4- pentanedione; tetraglyme = CH
3O(CH
2CH
2O)
4CH
3) precursor mixture. The structural and morphological characterization of films has been carried out using X-ray diffraction (XRD) and field emission scanning electron microscopy (FE-SEM). Chemical compositional studies have been performed by energy dispersive X-ray (EDX) analysis. Structural and morphological characterizations point to the formation of crystalline phases and homogeneous surfaces for both undoped and doped BiFeO
3 films. Piezoresponse force microscopy (PFM) and piezoresponce force spectroscopy (PFS) have been applied to study the piezoelectric and ferroelectric properties of the films.